ProductVARO Robotics Series Product About UsProductPR Center Overview OverviewA – Series (Actuator) S – Series (Semiconductor) Overview A - Series (Actuator) S - Series (Semiconductor) A – Series (Actuator) Ball Screw TypeVAS Ball Screw Type + CleanVAC Linear Motor TypeVAL S – Series (Semiconductor) Wafer Transfer RobotVSW Wafer Pre-AlignerVSA : CCD/EDGE Load Port(Foup Opener)VSL I – Series (Industrial Robot) SCARA Robot
