PR Striper
Features
- Wafer 4”,6”,8” 혼용 사용 가능
- Ring Frame 상의 Wafer 투입, 배출
- 고속 Spindle Motion으로 Wafer 표면의 PR 제거
- DI Water, IPA, N2를 이용한 Cleaning & Dry 수행
Specification
| Item | Description |
|---|---|
| Function | PR Stripping, Cleaning, Drying |
| Target Device | 4”,6”,8” Wafer on Ring Frame(COK필요) |
| Spin RPM | Max. 3,000 |
| Chuck | Vac. Type |
| Weight | Approx. 1,000kg |
| Dimension | W1,035mm x D1,635mm x H1,850mm |
Wafer Series
PR Coater
Wafer Series
PR Striper
Wafer Series
DI Cleaner
Wafer Series
Wafer Cosmetic Inspector
Wafer Series
Wafer Marker & Sorter
Wafer Series
Wafer Sorter
Wafer Series
Wafer Prober
Wafer Series
Wafer Plasma
Wafer Series