DI Cleaner
Features
- Loading/Unloading 한 Port로 구성
- Wafer 4”,6”,8” 혼용 사용 가능
- Spin Chuck Guide 단차 적용으로 다양한 사이즈의 Wafer 대응
Specification
| Item | Description |
|---|---|
| Function | Wafer Clean |
| Target Device | Wafer (4”,6”,8” 혼용 사용가능, COK필요) in Ring Frame |
| Spin RPM | Max. 3,000 |
| Chuck | Vac. Type |
| Weight | Approx. 750kg |
| Dimension | W1,050 x D850 x H1,700 |
Wafer Series
PR Coater
Wafer Series
PR Striper
Wafer Series
DI Cleaner
Wafer Series
Wafer Cosmetic Inspector
Wafer Series
Wafer Marker & Sorter
Wafer Series
Wafer Sorter
Wafer Series
Wafer Prober
Wafer Series
Wafer Plasma
Wafer Series