IR Filter Inspection
Features
- Loading/Unloading 한 Port로 구성
- Loading Port 4”,6”,8” 혼용 사용 가능
Specification
| Item | Description |
|---|---|
| Function | PR Coating |
| Target Device | 4” Wafer |
| Air Supply | 5~6kg/㎤ |
| Power | AC220V, 50/60Hz, 1 Phase |
| Control PC | I7 Quad Core, 4G Byte Memory, Window 7 32bit |
| Weight | 500kg |
| Dimension | W1,000 x D940 x H1,900 |
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