Wafer Sorter
Features
- Loading/Unloading 2 Port로 구성
- Wafer 4”,6”,8” 혼용 사용 가능
Specification
| Item | Description |
|---|---|
| Function | BCR/OCR Reading을 통해 Wafer Sorting기능을 수행 |
| Target Device | Wafer (4”,6”,8” 혼용 사용가능, COK필요) |
| Weight | Approx. 600kg |
| Dimension | W1,250 x D1,400 x H2,000 |
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