Wafer Marker & Sorter
Features
- Loading/Unloading Multi Port로 구성
- Wafer 4”,6”,8” 혼용 사용 가능
- Wafer Top & Back Side Marking (Optional)
Specification
| Item | Description |
|---|---|
| Function | Wafer Marking & Sorting |
| Target Device | Wafer (4”,6”,8” 혼용 사용가능, COK필요) |
| Wafer L/UL | Cassette |
| Laser Source | Customization |
| Weight | Approx. 800kg |
| Dimension | W1,300 x D1,350 x H1,800 |
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